D. V. Shengurov

1 та иш

Scientific-Research Physicotechnical Institute, Nizhnii Novgorod State University, Nizhnii Novgorod

1. Polycrystalline silicon films doped with aluminum during deposition

   D. V. Shengurov

   МақолаThin-Film Transistor TechnologiesTechnical Physics Letters19970 иқтибос

   ABIABI:AkademIndex/openalex/1997.article.000214