Chi Kyu Choi

1 та иш

1. Structural characterization and electro-physical properties for SiOC(–H) low-k dielectric films

   A. S. Zakirov, P. K. Khabibullaev, Chi Kyu Choi

   МақолаCopper Interconnects and ReliabilityPhysica B Condensed Matter20090 иқтибос

   ABIABI:AkademIndex/openalex/2009.article.000165