Shengjun Zhang

1 та иш

Key Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education and School of Physics and Technology, Wuhan University, Wuhan, 430072, China

1. Study of doping uniformity of a 200 kV ion implanter by RBS and sheet resistance measurements

   Hui Li, Ze-Song Wang, Shengjun Zhang +5

   МақолаIon-surface interactions and analysisNuclear Science and Techniques20160 иқтибос

   ABIABI:AkademIndex/openalex/2016.article.000334