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Effect of anodic etching of heavily doped silicon on the location of the plasma minimum

V. B. ShumanA. F. Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg
Technical Physics Lettersjournal1999en
ABI

Аннотация

It is shown experimentally that the minimum in the reflectance spectrum of heavily doped n-Si shifts strongly toward lower frequencies when porous Si layers form on it.

Ҳали таржима қилинмаган

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