Emission of quasi-thermal ions from a solid bombarded by cluster ions
Аннотация
Comparative studies of the emission of quasi-thermal atomic and cluster ions from V, Nb, Ta, Au, and In targets bombarded by cluster ions Au − (m = 1–9), as well as from Si and Bi targets bombarded by cluster ions Au − (m = 1–9) and Bi − (m = 1–5), with energy E 0 ranging from 6 to 21 keV are carried out. In the case of bombardment by heavy cluster ions, the fraction of the quasi-thermal component in the energy spectra of sputtered atomic ions reaches 50 (for V, In, and Au), 70 (Nb), or more than 90% (Ta). In addition, quasi-thermal ions play a considerable part in the emission of small cluster ions Au 2 + , In 2 + , In 3 + , and Bi + (n = 2–7). The results of the generalizing investigation favor the presence of thermal spike conditions at cluster bombardment and their appreciable contribution to the emission of atomic and small cluster ions.