Getting Variable-gap Solid Solution Si1−xGex From a Liquid Phase
A. Sh. RazzakovUrgench State UniversityA. LatipovaUrgench State UniversityAlibek QodirovUrgench State University
ABI
Аннотация
Using experimental data, as well as using theoretical calculations, the results of studies of the composition of melt solutions (Sn + Ge + Si, Ga + Ge + Si) from temperature conditions are presented. Single-crystal films of a graded-gap solid solution Si1-xGex (0<x<1) on Si <111> substrates were obtained by liquid-phase epitaxy from a limited tin, gallium solution-melt. Optimal technological growth modes are found for obtaining crystalline perfect epitaxial layers and structures.
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