Investigation of change of the composition and structure of the CaF2/Si films surface at the low-energy bombardment
Б. Е. УмирзаковInstitute of Plasma-Ion and Laser Technologies, Academy of Sciences of Uzbekistan, Durmon yuli str., 33, 100125 Tashkent, UzbekistanД. А. ТашмухамедоваTashkent State Technical University, Universitetskaya Street 2, 100095 Tashkent, UzbekistanМ. К. РузибаеваInstitute of Plasma-Ion and Laser Technologies, Academy of Sciences of Uzbekistan, Durmon yuli str., 33, 100125 Tashkent, UzbekistanFlyura DjurabekovaDepartment of Physics, P.O. Box 64, FIN-00014 University of Helsinki, FinlandS.B. DanaevTashkent State Technical University, Universitetskaya Street 2, 100095 Tashkent, Uzbekistan
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atomsjournal2014en
ABI
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