Shengjun Zhang

1 ta ish

Wuhan University

1. Study of doping uniformity of a 200 kV ion implanter by RBS and sheet resistance measurements

   Hui Li, Ze-Song Wang, Shengjun Zhang +5

   MaqolaIon-surface interactions and analysisNuclear Science and Techniques20160 iqtibos

   ABIABI:AkademIndex/2016.article.000334