Ziheng Liu

1 ta ish

Dalian University of Technology

1. Influence of collision processes in the sheath on ion energy distribution functions in radio frequency discharges

   Yu-Meng Cui, Fang‐Fang Ma, Ziheng Liu +3

   MaqolaPlasma Diagnostics and ApplicationsJournal of Vacuum Science & Technology A Vacuum Surfaces and Films20250 iqtibos

   ABIABI:AkademIndex/2025.article.005077