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The modification of structure and properties of semiconductors surface by active metals ions implantation

А.С. РысбаевM.T. NormuradovБ. Е. УмирзаковTashkent State Technical Univ., Tashkent (Uzbekistan)
1999en

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Ion-surface interactions and analysisSemiconductor materials and devicesSemiconductor materials and interfaces

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