Obtaining of epitaxial films of metal silicides by ion implantation and molecular beam epitaxy
Б. Е. УмирзаковTashkent State Technical University, University Str. 2, 700095 Tashkent, UzbekistanД. А. ТашмухамедоваTashkent State Technical University, University Str. 2, 700095 Tashkent, UzbekistanE.U. BoltaevTashkent State Technical University, University Str. 2, 700095 Tashkent, UzbekistanA.A. DzhurakhalovArifov Institute of Electronics, F. Khodjaev Str. 33, 700125 Tashkent, Uzbekistan
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