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Effect of different chemical treatments of surface on the height of Al-p-SiGe and Au-n-SiGe barriers

I. G. AtabaevStarodubtsev Physicotechnical Institute, Academy of Sciences of Uzbekistan, Tashkent, 100084, UzbekistanN. A. MatchanovStarodubtsev Physicotechnical Institute, Academy of Sciences of Uzbekistan, Tashkent, 100084, UzbekistanM. U. HajievAcademy of Sciences of UzbekistanV. A. PakAcademy of Sciences of UzbekistanTimur SalievAcademy of Sciences of Uzbekistan
Semiconductorsjournal2010en

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The effect of different chemical treatments on the properties of Au-n-SiGe and Al-p-SiGe Schottky barriers has been investigated. Etching under different conditions was used to prepare surfaces with different densities of surface states (D ss). It is shown that the barrier height in the structures under study correlates with the D ss value and germanium content in the Si1 − x Ge x alloy.

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