Computer simulation of SiC and B4C sputtering by Ar+ and He+ ions bombardment
T.S. PugachevaTashkent State Technical University, Universitetskaja 2, Tashkent 700095, UzbekistanF.G. JurabekovaTashkent State Technical University, Universitetskaja 2, Tashkent 700095, UzbekistanY. MiyagawaNational Industrial Research Institute of Nagoya, Nagoya, JapanSergey Kh. ValievThermophysics Department of Academy of Sciences of Uzbekistan, Tashkent, Uzbekistan
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atomsjournal1997en
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