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Optimization of vertically stacked nanosheet FET immune to self-heating

M. BalasubbareddyDepartment of Micro and Nanoelectronics, School of Electronics Engineering, Vellore Institute of Technology, Vellore, 632014, Tamil Nadu, IndiaK. SivasankaranDepartment of Micro and Nanoelectronics, School of Electronics Engineering, Vellore Institute of Technology, Vellore, 632014, Tamil Nadu, IndiaA. É. AtamuratovDepartment of Physics, Urgench State University, 14,Kh.Alimdjan Str., Urgench, 220100, UzbekistanM. M. KhalilloevDepartment of Physics, Urgench State University, 14,Kh.Alimdjan Str., Urgench, 220100, Uzbekistan
Micro and Nanostructuresjournal2023en
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Koʻrsatkichlar — AkademScholar · Tez orada