Comparison of electron irradiation on the formation of surface defects in situ and post thin-film LiF/Si(111) deposition
U. B. SharopovPhysical-Technical Institute, Uzbekistan Academy of Sciences, 100084, Tashkent, UzbekistanKulwinder KaurPunjab Engineering College (Deemed to be University), 160012, Chandigarh, IndiaМ. К. КурбановUrgench State University, 220100, Urgench, UzbekistanDilmurod SaidovUrgench Branch of Tashkent University of Information Technologies, 220100, Urgench, UzbekistanSh. R. NurmatovInstitute of Materials Science, Uzbekistan Academy of Sciences, 100084, Tashkent, UzbekistanMirkomil SharipovPhysical-Technical Institute, Uzbekistan Academy of Sciences, 100084, Tashkent, UzbekistanБ. Э. ЭгамбердиевTechnical University of Tashkent, 100095, Tashkent, Uzbekistan
ABI
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