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Ish: Auger electron spectroscopy and electron energy loss spectroscopy studies of the formation of silicon nitride by implanting low energy nitrogen ions into silicon
Electronic structure and optical properties of CaF2 films under low energy Ba+ ion-implantation combined with annealing
Б. Е. Умирзаков, T.S. Pugacheva, A.T. Tashatov +1
MaqolaInorganic Fluorides and Related CompoundsNuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms200016 iqtibosABI