Ion Implantation - Tool for Fabrication of Advanced 4H-SiC Devices
Evgenia V. KalininaIoffe Physicotechnical Institute RASG. KholuyanovIoffe Physicotechnical Institute RASYu. A. GoldbergIoffe Physicotechnical Institute RAST. BlankIoffe Physicotechnical Institute RASGrigory OnushkinIOFFE InstituteAnatoly M. Strel’chukA.F. Ioffe Physicotechnical Institute RASG. N. ViolinaElectrotechnical UniversityV. KossovElectron OptronicR. R. YafaevElectron OptronicAnders HallénKTH Royal Institute of TechnologyAndrey O. Konstantinov
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