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Investigation of profiles of the distribution of ion-implanted Mn atoms using the rutherford back scattering method and the influence of thermal annealing on them
Б. Э. Эгамбердиев, Б.Ч. Холлиев, A. S. Mallaev
MaqolaIon-surface interactions and analysisSurface Engineering and Applied Electrochemistry20070 iqtibosABI