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A. S. Khalmatov

6 works

Institute of Ion-Plasma and Laser Technologies, Academy of Sciences of Uzbekistan, ul. Durman yuli 33, Tashkent, 100125, Uzbekistan

  1. Analysis of profiles of atomic distribution over the depth of Si-Me free nanofilm systems

    Б. Е. Умирзаков, З. А. Исаханов, М. К. Рузибаева +2

    ArticleSemiconductor materials and interfacesTechnical Physics20155 citations
    ABI

  2. Estimation of the sizes of disordered surface regions of Cu and Ag thin films using the ion transmission method

    З. А. Исаханов, Б. Е. Умирзаков, М. К. Рузибаева +2

    ArticleCopper Interconnects and ReliabilityJournal of Surface Investigation X-ray Synchrotron and Neutron Techniques20130 citations
    ABI

  3. Temperature Dependences of the Sputtering of Negative Silicon Cluster Ions

    Б.Г. Атабаев, R. Dzabbarganov, F. R. Yuzikaeva +3

    ArticleIon-surface interactions and analysisJournal of Surface Investigation X-ray Synchrotron and Neutron Techniques20230 citations
    ABI

  4. The Effect of Atmospheric Oxide Thermodesorption on Negative-Ion Atomic and Cluster Sputtering of Silicon Single Crystal by Cesium Ions

    Б.Г. Атабаев, R. Djabbarganov, A. S. Khalmatov +2

    ArticleIon-surface interactions and analysisJournal of Surface Investigation X-ray Synchrotron and Neutron Techniques20240 citations
    ABI

  5. The effect of atmospheric oxide thermodesorption on negative-ion atomic and cluster sputtering of silicon single crystal by cesium ions

    Б.Г. Атабаев, R. Djabbarganov, A. S. Khalmatov +2

    ArticleIon-surface interactions and analysisПоверхность Рентгеновские синхротронные и нейтронные исследования20240 citations
    ABI

  6. Emission of Negative Copper Cluster Ions as a Function of Temperature and Bombarding Ion Energy

    R. Djabbarganov, B. G. Atabaev, A. S. Khalmatov

    ArticleIon-surface interactions and analysisJournal of Surface Investigation X-ray Synchrotron and Neutron Techniques20250 citations
    ABI