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Investigation of sputtering and oxygen desorption processes by binary collision approximation method

A.A. DzhurakhalovTheoretical Department, Arifov Institute of Electronics, F. Khodjaev Str. 33, 700125 Tashkent, UzbekistanS.E. RahmatovTheoretical Department, Arifov Institute of Electronics, F. Khodjaev Str. 33, 700125 Tashkent, UzbekistanH. DreysséIPCMS—GEMME, 23, rue du Loess BP43, 67034 Strasbourg, France
Computational Materials Sciencejournal2005en
ABI

Abstract

No abstract available.

Topics

Ion-surface interactions and analysisDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics

Identifiers

DOI
10.1016/j.commatsci.2004.12.050

Citations and references

Cited by 015 references
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