Investigation of sputtering and oxygen desorption processes by binary collision approximation method
A.A. DzhurakhalovTheoretical Department, Arifov Institute of Electronics, F. Khodjaev Str. 33, 700125 Tashkent, UzbekistanS.E. RahmatovTheoretical Department, Arifov Institute of Electronics, F. Khodjaev Str. 33, 700125 Tashkent, UzbekistanH. DreysséIPCMS—GEMME, 23, rue du Loess BP43, 67034 Strasbourg, France
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