S.A. Lem

Работ: 2

Tashkent State Technical University, Universitetskaja 2, Tashkent 700095, Uzbekistan

1. The radiation stimulated diffusion role in high dose, low energy, high temperature ion implantation

   S.H. Valiev, T.S. Pugacheva, F.G. Jurabekova +2

   СтатьяSilicon and Solar Cell TechnologiesNuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms1997Цитирований: 1

   ABIABI:AkademIndex/openalex/2026.other.488712

2. The simulation of silicon doping by ion bombardment

   T.S. Pugacheva, F.G. Dzhurabekova, S.A. Lem

   СтатьяIon-surface interactions and analysis1995Цитирований: 0

   ABIABI:AkademIndex/openalex/1995.article.000192