S.V. Yugay
Работ: 2
Institute of Applied Physics, National University of Uzbekistan, Tashkent, Uzbekistan
Computer simulation of ion implantation with visual observation of the implantation profiles
F.G. Djurabekova, T.S. Pugacheva, F.F. Umarov +1
СтатьяSilicon and Solar Cell Technologies2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)2002Цитирований: 0ABIComputer simulation of ion implantation with visual observation of the implantation profiles
Flyura Djurabekova, T.S. Pugacheva, F. F. Umarov +1
СтатьяIon-surface interactions and analysis2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)2003Цитирований: 0ABI