G. Kh. Allaerova

Работ: 1

Tashkent State Technical University, 100097, Tashkent, Uzbekistan

1. The Effect of Stepwise Postimplantation Annealing on the Composition and Structure of Silicon Surface Layers Implanted with Alkali Metal Ions

   Б. Е. Умирзаков, З. А. Исаханов, G. Kh. Allaerova +1

   СтатьяSemiconductor materials and interfacesTechnical Physics Letters2021Цитирований: 0

   ABIABI:AkademIndex/openalex/2021.article.004233