Статья

Hydrogen determination in silicon nitride films by the nuclear recoil method

И. П. ЧерновResearch Institute of Nuclear Physics, 2a Lenin Avenue, Tomsk 634051, U.S.S.RV. N. ShadrinResearch Institute of Nuclear Physics, 2a Lenin Avenue, Tomsk 634051, U.S.S.RJu.P. CherdantsevResearch Institute of Nuclear Physics, 2a Lenin Avenue, Tomsk 634051, U.S.S.RV. N. SulemaResearch Institute of Nuclear Physics, 2a Lenin Avenue, Tomsk 634051, U.S.S.RL.V. ChramovaInstitute of Inorganic Chemistry, 3 Science Avenue, Novosibirsk 630090, U.S.S.RT. P. SmirnovaInstitute of Inorganic Chemistry, 3 Science Avenue, Novosibirsk 630090, U.S.S.RV. I. BelyĭInstitute of Inorganic Chemistry, 3 Science Avenue, Novosibirsk 630090, U.S.S.R

Thin Solid Filmsjournal1982en

ABI

Аннотация

Аннотация отсутствует.

Темы

Silicon and Solar Cell Technologies Semiconductor materials and interfaces Semiconductor materials and devices

Идентификаторы

DOI: 10.1016/0040-6090(82)90349-2

Цитирования и источники

Цитирований: 0Использованных источников: 5

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