The effect of γ radiation on the temperature dependence of the surface generation velocity at a Si-SiO2 interface

We have studied the effect of γ radiation on the generation characteristics of a silicon-silicon dioxide (Si-SiO2) interface formed upon thermal oxidation of the surface of silicon. The irradiation leads to the appearance of a temperature dependence of the surface generation velocity. This effect is related to the formation of radiation-induced traps capable of exchanging trapped carriers with the bulk of a semiconductor by means of tunneling emission.

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