Gettering of gold by samarium and gadolinium in silicon

Аннотация

For the first time, by the methods of tracer atoms, autoradiography, isothermal relaxation of capacity and current, and measurement of conductivity and Hall effect, an effective gettering of gold in silicon was found at combined or sequential diffusion of the rare-earth elements samarium or gadolinium in silicon, in its near-surface layers, where there is a region of high concentration of the IIIA group element, samarium or gadolinium, as well as in the bulk silicon.

Темы

Идентификаторы

DOI

10.3103/s1068375507030143

Цитирования и источники