M. Yu. Adylov

1 та иш

Abu Raikhan Beruni State Technical University, Tashkent, Uzbekistan

1. Manganese depth-concentration profiles in ion-implanted silicon studied by Rutherford backscattering

   Б. Э. Эгамбердиев, M. Yu. Adylov

   МақолаIon-surface interactions and analysisTechnical Physics Letters20012 иқтибос

   ABIABI:AkademIndex/openalex/2026.other.144424