E.U. Boltaev

1 та иш

Tashkent State Technical University, University Str. 2, 700095 Tashkent, Uzbekistan

1. Obtaining of epitaxial films of metal silicides by ion implantation and molecular beam epitaxy

   Б. Е. Умирзаков, Д. А. Ташмухамедова, E.U. Boltaev +1

   МақолаSemiconductor materials and interfacesMaterials Science and Engineering B200314 иқтибос

   ABIABI:AkademIndex/openalex/2003.article.000028