G. Kh. Allaerova

1 та иш

Tashkent State Technical University, 100097, Tashkent, Uzbekistan

1. The Effect of Stepwise Postimplantation Annealing on the Composition and Structure of Silicon Surface Layers Implanted with Alkali Metal Ions

   Б. Е. Умирзаков, З. А. Исаханов, G. Kh. Allaerova +1

   МақолаSemiconductor materials and interfacesTechnical Physics Letters20210 иқтибос

   ABIABI:AkademIndex/openalex/2021.article.004233