Мақола

Composition, morphology, and electronic structure of the nanophases created on the SiO2 Surface by Ar+ ion bombardment

M. B. YusupjanovaTashkent State Technical University, ul. Universitetskaya 2, Tashkent, 100095, UzbekistanД. А. ТашмухамедоваTashkent State Technical University, ul. Universitetskaya 2, Tashkent, 100095, UzbekistanБ. Е. УмирзаковTashkent State Technical University, ul. Universitetskaya 2, Tashkent, 100095, Uzbekistan

Technical Physicsjournal2016en

ABI

Аннотация

The influence of Ar+ bombardment on the composition and the structure of the SiO2/Si surface is studied. A thin Si film is found to form on the SiO2 surface subjected to high-dose ion bombardment.

Мавзулар

Ion-surface interactions and analysis Advanced Memory and Neural Computing Semiconductor materials and devices

Идентификаторлар

DOI: 10.1134/s1063784216040253

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