Growth of transparent electrical conducting films of indium and tin oxides by chemical vapor deposition
I. G. AtabaevPhysical-Technical Institute Physics of the Sun, Academy of Sciences of Uzbekistan, Tashkent, UzbekistanM. U. HajievPhysical-Technical Institute Physics of the Sun, Academy of Sciences of Uzbekistan, Tashkent, UzbekistanV. A. PakPhysical-Technical Institute Physics of the Sun, Academy of Sciences of Uzbekistan, Tashkent, UzbekistanS. B. ZakirovaPhysical-Technical Institute Physics of the Sun, Academy of Sciences of Uzbekistan, Tashkent, UzbekistanKh. N. JuraevPhysical-Technical Institute Physics of the Sun, Academy of Sciences of Uzbekistan, Tashkent, Uzbekistan
ABI
Аннотация
ITO structures (indium and tin oxides)/glass characterized by high conductivity and transparency and a thickness of up to 3 μm applicable for the fabrication of solar cells on their basis were grown by the chemical vapor deposition technique in a quasi-closed volume using a separate evaporator.
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