S.H. Valiev
1 ta ish
Thermophysics Department of Academy of Sciences of Uzbekistan, Tashkent, Uzbekistan
The radiation stimulated diffusion role in high dose, low energy, high temperature ion implantation
S.H. Valiev, T.S. Pugacheva, F.G. Jurabekova +2
MaqolaSilicon and Solar Cell TechnologiesNuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms19971 iqtibosABI