Modification of structure and properties of semiconductor surface by ion implantation with active metals
А.С. РысбаевSh.H. DjuraevA.M. RahimovTashkent State Technical Univ., Tashkent (Uzbekistan)J. B. KhujaniyozovTashkent State Technical Uuniversity, Tashkent (Uzbekistan)A. K. TashatovKarshi State Technical University
Ochiq kirish: yoʻq
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