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Modification of the Silicon Carbide by Proton Irradiation

Е. В. БогдановаRussian Academy of SciencesVitalii V. KozlovskiSt. Petersburg State Polytechnical UniversityD. S. RumyantsevA.N. VolkovaIoffe Physicotechnical Institute RASA. А. LebedevRussian Academy of Sciences
Materials science forumbook series2004en
Ochiq kirishGibrid

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Mavzular

Silicon and Solar Cell TechnologiesSemiconductor materials and devicesSilicon Carbide Semiconductor Technologies

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DOI
10.4028/www.scientific.net/msf.457-460.817

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