S.V. Yugay
2 works
Institute of Applied Physics, National University of Uzbekistan, Tashkent, Uzbekistan
Computer simulation of ion implantation with visual observation of the implantation profiles
F.G. Djurabekova, T.S. Pugacheva, F.F. Umarov +1
ArticleSilicon and Solar Cell Technologies2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)20020 citationsABIComputer simulation of ion implantation with visual observation of the implantation profiles
Flyura Djurabekova, T.S. Pugacheva, F. F. Umarov +1
ArticleIon-surface interactions and analysis2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)20030 citationsABI