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The Influence of Fin Shape on the Amplitude of Random Telegraph Noise in the Subthreshold Regime of a Junctionless FinFET

M. M. KhalilloevUrgench State University, 220100, Urgench, UzbekistanB. O. JabbarovaUrgench State University, 220100, Urgench, UzbekistanAslan NasirovNational University of Uzbekistan, 100200, Tashkent, Uzbekistan
Technical Physics Lettersjournal2019en
ABI

Abstract

The dependence of random telegraph noise (RTN) amplitude on the gate overdrive in a junctionless field-effect transistor (FinFET) with rectangular and trapezoidal channel (fin) cross sections manufactured using silicon-on-insulator technology has been numerically simulated. It is established that the RTN amplitude in the subthreshold region of gate voltages for a FinFET with a trapezoidal cross section of channel is significantly lower than that for the transistor with rectangular cross section of a channel. In addition, under the same conditions, the RTN amplitude at the threshold gate voltage in a junctionless FinFET is significantly lower than that in planar fully depleted and in usual FinFET.

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