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Radiation-Stimulated Transformation of Cxygen Atoms Between Impurity Phase States of A Growing Silicon Single Crystal

M. U. KalanovInstitute of Nuclear Physics of the Academy of Sciences of the Republic of Uzbekistan, 100214, Tashkent, UzbekistanI. I. SadikovInstitute of Nuclear Physics of the Academy of Sciences of the Republic of Uzbekistan, 100214, Tashkent, UzbekistanSh. R. MalikovInstitute of Nuclear Physics of the Academy of Sciences of the Republic of Uzbekistan, 100214, Tashkent, UzbekistanA. V. KhugaevInstitute of Nuclear Physics of the Academy of Sciences of the Republic of Uzbekistan, 100214, Tashkent, UzbekistanAbror KorakhodjaevInstitute of Nuclear Physics of the Academy of Sciences of the Republic of Uzbekistan, 100214, Tashkent, UzbekistanA.S. SaidovPhysical and Technical Institute of the Academy of Sciences of the Republic of Uzbekistan, 100084, Tashkent, UzbekistanShukrillo UsmonovPhysical and Technical Institute of the Academy of Sciences of the Republic of Uzbekistan, 100084, Tashkent, UzbekistanD. V. SaparovPhysical and Technical Institute of the Academy of Sciences of the Republic of Uzbekistan, 100084, Tashkent, Uzbekistan
Siliconjournal2025en
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