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Иш: Cluster projectile ions used for the SIMS analysis of silicon
Features of polyatomic ion emission under sputtering of a silicon single crystal by Au− cluster ions
Sh.Dj. Akhunov, С. Н. Морозов, У. Х. Расулев
МақолаIon-surface interactions and analysisNuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms200313 иқтибосABIComparative study of polyatomic secondary ion emission from silicon with <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si11.gif" overflow="scroll"><mml:mrow><mml:msubsup><mml:mrow><mml:mtext>Au</mml:mtext></mml:mrow><mml:mrow><mml:mi>m</mml:mi></mml:mrow><mml:mrow><mml:mo>-</mml:mo></mml:mrow></mml:msubsup></mml:mrow></mml:math>, <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si12.gif" overflow="scroll"><mml:mrow><mml:msubsup><mml:mrow><mml:mtext>Si</mml:mtext></mml:mrow><mml:mrow><mml:mi>m</mml:mi></mml:mrow><mml:mrow><mml:mo>-</mml:mo></mml:mrow></mml:msubsup></mml:mrow></mml:math> and <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si13.gif" overflow="scroll"><mml:mrow><mml:msubsup><mml:mrow><mml:mtext>C</mml:mtext></mml:mrow><mml:mrow><mml:mi>m</mml:mi></mml:mrow><mml:mrow><mml:mo>-</mml:mo></mml:mrow></mml:msubsup></mml:mrow></mml:math> projectiles
МақолаIon-surface interactions and analysisNuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms200611 иқтибосABIComparative study of kinetic energy spectra and mass distributions of Ta+ ions sputtered from tantalum by atomic and molecular ion bombardment
S.F. Belykh, У. Х. Расулев, A.V. Samartsev +1
МақолаIon-surface interactions and analysisNuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms19988 иқтибосABISurface Mass Spectrometry at the Submicrometer Scale
С. В. Верхотуров, E. A. Schweikert, Nabil Rizkalla
Мақола20022 иқтибосABI