Мақола

Thermal spikes observed during the tantalum sputtering by gold cluster ions

С. Н. МорозовArifov Institute of Electronics, Academy of Sciences of the Republic of Uzbekistan, Tashkent, UzbekistanУ. Х. РасулевArifov Institute of Electronics, Academy of Sciences of the Republic of Uzbekistan, Tashkent, Uzbekistan

Technical Physics Lettersjournal2003en

ABI

Аннотация

The emission of atomic and cluster ions during the sputtering of a tantalum target by gold cluster ions was experimentally studied for primary ion energies ranging from 6 to 21 keV. An increase in the number of atoms in the bombarding cluster ions of gold leads to a considerable increase in the yield of atomic ions of tantalum possessing quasithermal energies. The results provide experimental evidence for the appearance of thermal spikes in the target bombarded with cluster ions, with the corresponding contribution to the emission of atomic ions.

Мавзулар

Ion-surface interactions and analysis Nuclear Materials and Properties Integrated Circuits and Semiconductor Failure Analysis

Идентификаторлар

DOI: 10.1134/1.1544355

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