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Ish: Transition layer formation simulation during film deposition by an ion-molecular beam
Study of the Influence of Implanted Atoms on the Coefficients of the Sputtering of Silicon and Silicon with a Thin Oxide Film
Д. А. Ташмухамедова, M. B. Yusupjanova, A. K. Tashatov +1
MaqolaIon-surface interactions and analysisJournal of Surface Investigation X-ray Synchrotron and Neutron Techniques20185 iqtibosABIThe radiation stimulated diffusion role in high dose, low energy, high temperature ion implantation
S.H. Valiev, T.S. Pugacheva, F.G. Jurabekova +2
MaqolaSilicon and Solar Cell TechnologiesNuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms19971 iqtibosABI