M. B. Yusupjanova
Работ: 8
Tashkent State Technical University, ul. Universitetskaya 2, Tashkent, 100095, Uzbekistan
Study of the Influence of Implanted Atoms on the Coefficients of the Sputtering of Silicon and Silicon with a Thin Oxide Film
Д. А. Ташмухамедова, M. B. Yusupjanova, A. K. Tashatov +1
СтатьяIon-surface interactions and analysisJournal of Surface Investigation X-ray Synchrotron and Neutron Techniques2018Цитирований: 5ABI