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Growing of perfect single-crystal epitaxial films of (Si 2 ) 1-x (GaN) x solid solutions on Si (111) substrates from the liquid phase

D. V. SaparovPhysical Technical Institute of Uzbekistan Academy of SciencesA.S. SaidovPhysical Technical Institute of Uzbekistan Academy of SciencesSh. N. UsmonovPhysical Technical Institute of Uzbekistan Academy of SciencesTolmas IshniyazovPhysical Technical Institute of Uzbekistan Academy of SciencesM. U. KalanovA. M. AkhmedovTashkent Institute of Irrigation and Agriculture Mechanization Engineers
Research Squarerepository2023en
ABI

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Abstract The technological capabilities of the method of liquid-phase epitaxy from a limited volume of Sn solution-melt for obtaining films of substitutional solid solution (Si 2 ) 1−x (GaN) x on Si (111) substrates are shown. The grown films had a single-crystal structure with (111) orientation, n -type conductivity with a resistivity of ρ ~ 1.38 Ω∙cm, a carrier concentration of n ~ 3.4∙10 16 cm − 3 , and a charge carrier mobility of µ ~ 133 cm 2 /(V⋅sec). The relatively narrow width (FWHM = 780 arcsec) and high intensity (2⋅10 5 pulses/sec) of the main structural reflection (111) Si/GaN indicate a high degree of perfection of the crystal lattice of the epitaxial layer (Si 2 ) 1−x (GaN) x . The photosensitivity region of p -Si– n -(Si 2 ) 1−x (GaN) x heterostructures covers the photon energy range from 1.2 to 2.4 eV, with a maximum at 1.9 eV.

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