Article

Optimization of vertically stacked nanosheet FET immune to self-heating

M. BalasubbareddyDepartment of Micro and Nanoelectronics, School of Electronics Engineering, Vellore Institute of Technology, Vellore, 632014, Tamil Nadu, IndiaK. SivasankaranDepartment of Micro and Nanoelectronics, School of Electronics Engineering, Vellore Institute of Technology, Vellore, 632014, Tamil Nadu, IndiaA. É. AtamuratovDepartment of Physics, Urgench State University, 14,Kh.Alimdjan Str., Urgench, 220100, UzbekistanM. M. KhalilloevDepartment of Physics, Urgench State University, 14,Kh.Alimdjan Str., Urgench, 220100, Uzbekistan

Micro and Nanostructuresjournal2023en

ABI

Abstract

No abstract available.

Topics

Semiconductor materials and devices Advancements in Semiconductor Devices and Circuit Design Silicon Carbide Semiconductor Technologies

Identifiers

DOI: 10.1016/j.micrna.2023.207633

Citations and references

Cited by 5 42 references

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