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Work: Regularities of the Formation of SiO2 Nanophases and Nanofilms on a Si Surface during ${\text{O}}_{2}^{ + }$-Ion Implantation

  1. An ion track based approach to nano- and micro-electronics

    K. Hoppe, W. R. Fahrner, D. Fink +7

    Article20089 citations
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  2. Untitled

    Other1 citations
    ABI