Current-voltage characteristics of Si/Si1 − x Ge x heterodiodes fabricated by direct bonding
Аннотация
We have studied the current-voltage (I–U) characteristics of Si/Si1 − x Ge x (0.02 < x < 0.15) heterodiodes fabricated by direct bonding of (111)-oriented n-type single crystal silicon wafers with p-type Si1 − x Ge x wafers of the same orientation containing 2–15 at % Ge. An increase in the germanium concentration N Ge in Si1 − x Ge x crystals is accompanied by a growth in the density of crystal lattice defects, which leads to a decrease in the minority carrier lifetime in the base of the heterodiode and an increase in the recombination component of the forward current and in the differential resistance (slope) of the I–U curve. However, for all samples with N Ge ≤ 15 at %, the I–U curves of Si/Si1 − x Ge x heterodiodes are satisfactory in the entire range of current densities (1 mA/cm2–200 A/cm2). This result shows good prospects for using direct bonding technology in the fabrication of Si/Si1 − x Ge x heterostructures.