Ion-surface interactions and analysis
446 works
<title>Comparative study of ion channeling and implantation into Si(110), SiC(110), GaP(110), AsGa(110)</title>
A. M. Rasulov, A.A. Dzhurakhalov, F. F. Umarov +2
ArticleIon-surface interactions and analysisProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE20050 citationsABIInvestigation of profiles of the distribution of ion-implanted Mn atoms using the rutherford back scattering method and the influence of thermal annealing on them
Б. Э. Эгамбердиев, Б.Ч. Холлиев, A. S. Mallaev
ArticleIon-surface interactions and analysisSurface Engineering and Applied Electrochemistry20070 citationsABI